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                    PRODUCT

                    首页 ? Product ? Vacuum Metallurgy Equipment ? Tubular CVD Furnace

                    High Temperature Vacuum tube shape CVD Furnace (linear type)
                    编号:SN20151119173627581
                    类别:Tubular CVD Furnace
                    • 产品概述
                    • 规格参数
                    • 服务支持

                      设备用途    Application

                      本设备主要用于对工件进行高温CVD实验。

                      The equipment is used for conduct high temperature CVD experiment on work piece.

                      设备组成    Structure

                      该系统主要由真空石英管组件、底部不锈钢真空室组件、样品感应加热组件、反应物加热组件、样品台组件、气路组件、加热控温组件、安装台架、水冷系统等组成。

                       

                      The system consists of quartz vacuum tube unit, stainless steel vacuum chamber unit, sample induction heating unit, reaction substance heating unit, sample table unit, working gas circuit unit, heating temperature control unit, mounting base and water cooling system etc.

                      型号

                      Model

                       

                      真空系统配置

                      Vacuum system feature

                      机械泵、阀门等

                      Mechanical pump, valves etc

                      抽速

                      Pumping rate

                      4l/S

                      真空室

                      Vacuum chamber

                      由石英管和不锈钢真空组成;石英管采用直线形,垂直安装,设有水冷装置;石英管尺寸:Φ86(Φ106/Φ200mm×900mm,壁厚3mm

                      Consisted by quartz tube and stainless steel vacuum chamber; quartz tube is linear type, installed vertically, equipped with water cooling device; quartz tube size: Φ86(Φ106/Φ200mm×900mm, walk thickness: 3mm

                      真空系统配置

                      Vacuum system feature

                      分子泵、机械泵、宽量程数显真空计、阀门等

                      Molecular pump, mechanical pump, wide range digital display vacuum gauge, valves etc

                      样品台

                      Sample table

                      可升降和旋转,转速可调(1-5RPM

                      Moving vertically and rotary, rotation speed is adjustable (1-5rpm)

                      样品测温组件

                      Sample temperature measuring unit

                      采用热电偶方式

                      Use thermocouple measuring mode

                      感应加热电源

                      Induction heating power

                      感应加热可以控温;额定输出功率60KW;基体加热温度300-1500℃;升温速率40-50/min

                      Induction heating temperature is controllable; rate output power: 60KW; matrix heating temperature 300-1500; temperature increase rate 40-50/min

                      感应线圈

                      Induction coil

                      尺寸:外径Φ10mm,内径Φ6mm,高度165mm

                      Size: outer diameter Φ10mm, inner diameter Φ6mm, height 165mm

                      反应物加热组件

                      Reaction substance heating unit

                      采用外加热方式,加热温度可控(室温-1100度)

                      External heating, temperature adjustable (room temperature-1100)

                      工作气路

                      Working gas circuit

                      共四路:三路氯气、一路氢气,气路通过浮子流量计进气

                      4 circuits: 3 Chlorine, 1 Hytrogen, gas inflow through float flowmeter

                      工作台架

                      Working frame

                      尺寸:800mmL)×800mm×700mmH

                      Dimension: 800mmL)×800mm×700mmH

                       

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