首页 ? Product ? Vacuum Metallurgy Equipment ? Tubular CVD Furnace
设备用途 Application
本设备主要用于对工件进行高温CVD实验。
The equipment is used for conduct high temperature CVD experiment on work piece.
设备组成 Structure
该系统主要由真空石英管组件、底部不锈钢真空室组件、样品感应加热组件、反应物加热组件、样品台组件、气路组件、加热控温组件、安装台架、水冷系统等组成。
The system consists of quartz vacuum tube unit, stainless steel vacuum chamber unit, sample induction heating unit, reaction substance heating unit, sample table unit, working gas circuit unit, heating temperature control unit, mounting base and water cooling system etc.
型号 Model |
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真空系统配置 Vacuum system feature |
Mechanical pump, valves etc |
抽速 Pumping rate |
4l/S |
真空室 Vacuum chamber |
由石英管和不锈钢真空组成;石英管采用直线形,垂直安装,设有水冷装置;石英管尺寸:Φ86(Φ106/Φ200)mm×900mm,壁厚3mm。 Consisted by quartz tube and stainless steel vacuum chamber; quartz tube is linear type, installed vertically, equipped with water cooling device; quartz tube size: Φ86(Φ106/Φ200)mm×900mm, walk thickness: 3mm |
真空系统配置 Vacuum system feature |
分子泵、机械泵、宽量程数显真空计、阀门等 Molecular pump, mechanical pump, wide range digital display vacuum gauge, valves etc |
样品台 Sample table |
可升降和旋转,转速可调(1-5RPM) Moving vertically and rotary, rotation speed is adjustable (1-5rpm) |
样品测温组件 Sample temperature measuring unit |
采用热电偶方式 Use thermocouple measuring mode |
感应加热电源 Induction heating power |
感应加热可以控温;额定输出功率60KW;基体加热温度300-1500℃;升温速率40-50℃/min Induction heating temperature is controllable; rate output power: 60KW; matrix heating temperature 300-1500℃; temperature increase rate 40-50℃/min |
感应线圈 Induction coil |
尺寸:外径Φ10mm,内径Φ6mm,高度165mm Size: outer diameter Φ10mm, inner diameter Φ6mm, height 165mm |
反应物加热组件 Reaction substance heating unit |
采用外加热方式,加热温度可控(室温-1100度) External heating, temperature adjustable (room temperature-1100℃) |
工作气路 Working gas circuit |
共四路:三路氯气、一路氢气,气路通过浮子流量计进气 4 circuits: 3 Chlorine, 1 Hytrogen, gas inflow through float flowmeter |
工作台架 Working frame |
尺寸:800mm(L)×800mm×700mm(H) Dimension: 800mm(L)×800mm×700mm(H) |
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