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                    PRODUCT

                    首页 ? Product ? PVD Coating Equipment ? Evaporation Coating Equipment

                    RH Heat Evaporation Vacuum Coating Equipment
                    编号:SN20151119171047234
                    类别:Evaporation Coating Equipment
                    • 产品概述
                    • 规格参数
                    • 服务支持

                      设备用途    Application

                      用于有机半导体材料的物理化学性能研究实验、有机半导体器件的原理研究实验、OLED实验研究及有机太阳能薄膜电池实验研究。可广泛应用于大专院校、科研院所的薄膜材料的科研与小批量制备。

                      Used in the physical chemical properties research and experiment of organic semiconductor, theory research and experiment of organic semiconductor device, OLED research and research of organic solar film cell. Can be widely used in small volume production and on the scientific research on film materials by universities and research institutes.

                      设备组成    Structure

                      该系统主要由真空室腔体组件、盒式热阻蒸发舟及电源、Filtech膜厚监测仪、样品台、真空本底抽气与真空测量、真空室照明装置、烘烤装置、机架及电控柜等组成。

                       

                      The system consists of vacuum chamber unit, cartridge heat resistance evaporation boat and power, Filtech film thickness monitor, sample table, vacuum pumping and vacuum measurement, vacuum chamber lighting device, baking device, mounting base and electric cabinet etc.

                      型号 Model

                      BOX-RH400

                      主真空室

                      Primary vacuum chamber

                      方箱立式真空室,尺寸约为400×400×450mm

                      Square box vertical vacuum chamber, size: 400×400×450mm

                      真空系统配置

                      Vacuum system feature

                      机械泵、分子泵、复合数显真空测量规与计、阀门等。

                      Mechanical pump, molecular pump, compound digital-display vacuum gauge and meter, valves etc.

                      极限压力

                      Ultimate pressure

                      2.0×10-5 Pa

                      恢复真空时间

                      Time required to reacquire vacuum

                      30分钟可达到8.0×10-4 Pa(系统短时间暴露大气并充干燥氮气开始抽气)

                      8.0×10-4 Pa in 30 mins (pumping after short exposure to air and filled with helium)

                      盒式热阻蒸发舟及电源

                      Cartridge heat resistance evaporation boat and power

                      热阻蒸发舟水冷电极:6个;热阻蒸发舟(采用钨舟):备件10个;

                      热阻蒸发电源:3台,输出功率3Kw,有微调功能;蒸发舟挡板:3

                      Heat resistance evaporation boat water cooling electrode: 6; heat resistance evaporation boat (Tungsten boat): spare parts 10; heat resistance evaporation power: 3, output power 3Kw, with adjustable function; evaporation boat baffle: 3 sets

                      Filtech膜厚监测仪(美国Filtech SQM200

                      Filtech film thickness monitor (US Filtech SQM200)

                      厚度分辨率

                      Thickness resolution ratio

                      不平均:0.0133/测量;50个样品平均:0.002/测量

                      Non-uniformity: 0.0133Å/measure; 50 samples average: 0.002 Å/measure

                      速率分辨率

                      Velocity resolution ratio

                      不平均:0.0133/秒;50个样品平均:0.02/

                      Non-uniformity: 0.0133Å/sec; 50 samples average: 0.02 Å/sec

                      精度

                      Precision

                      0.03HZ/测量,2ppm

                      0.03HZ/measure, 2ppm

                      速度

                      Speed

                      每秒测量十次

                      Measuring 10 times per second

                      样品台

                      Sample table

                      样品尺寸

                      Sample size

                      120×120mm基片,可放置42.0*34.0mm小基片6

                      120×120mm, can load 6 pieces 42.0*34.0mm substrates

                      运动方式

                      Mode of motion

                      基片可连续回转,转速520/

                      Substrate rotates continuously, rotation speed:5-20 rpm

                      水冷

                      Water cooling

                      水冷旋转接头方式,保证镀膜温度不超过40

                      Water cooling rotating connection, coating temperature no more than 40

                      真空室照明装置

                      Vacuum chamber lighting device

                      采用LED外照明方式,避免镀膜污染照明灯

                      LED lighting outside chamber, to prevent film coating contaminate lighting

                      烘烤装置

                      Baking device

                      在真空室外烘烤带的烘烤方式

                      Baking with hot wire outside vacuum chamber

                      报警及保护系统

                      Alarm and protection system

                      对泵、电极等缺水,过流过压,断路等异常情况进行报警并执行相应保护措施;完善的逻辑程序互锁保护系统

                      Reporting error and perform protection measure on pump and electrode water shortage, overcurrent, overvoltage and short circuit etc; complete logic program interlocks protection system

                       

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