首页 ? Product ? Vacuum Acquiring Equipment ? Scroll Dry Pump Series
Main applications
Used for scientific and chemical analysis
An aux.pump in oil-free pumping system
Used in enclosing room in sem-conductor fab.equipments
An aux.pump in electron miscrope
Used in Ic equipment
Technical Features
Invulnerable to exterior dust contamination
Interior oil-free, clean vacuum assured
Smooth running, low noise
Water cooling unneeded, corrosion-proof
Easy operation, low maintenance expense
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项目内容 Subject |
技术指标 Specification |
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型号 Model |
WXG-16A |
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名义抽速 Nominal pumping rate |
16L/S |
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极限压力 Ultimate pressure |
≤1Pa |
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涡旋泵漏率 Scroll pump leak rate |
1×10-6 Pa.m3/S，特殊气体可做到1×10-8Pa.m3/S |
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水汽处理能力（开气镇） Steam treatment capacity (gas ballast open) |
25g/day |
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电机参数 Motor parameter |
三相/单相380V/220V 50Hz 1.5KW |
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转数 Rotation speed |
1450 rpm（50Hz） |
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环境温度 Temperature |
5~40℃ |
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噪音 Noise |
＜68dB |
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噪音（气镇） Noise (gas ballast) |
＜74dB |
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进气口连接法兰 Gas inlet connecting flange |
KF40 |
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排气口连接法兰 Gas outlet connecting flange |
KF40 |
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外形尺寸（L×W×H） Dimension |
563×392×407（mm） |
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重量 Weight |
60Kg |
| 上一篇：8L |
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