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                    PRODUCT

                    首页 ? Product ? LED Substrate And Window Sheet Manufacturing Equipment ? SiC Crystalline Furnace

                    SiC Mono-crystal Furnace
                    编号:SN20151119114326493
                    类别:SiC Crystalline Furnace
                    • 产品概述
                    • 规格参数
                    • 服务支持

                      设备用途 Equipment Application

                      主要用于半导体和LED行业。采用中频感应加热方式,物理气相传输法生长优质光学晶体。

                      Mainly used in Semi-conductor and LED industry. Growing high quality optics crystal using physical vapor transfer method by employing medium frequency induction heating method.

                      设备组成 Main Unit

                      本系统由沉积真空室、感应加热台系统、进样室、自动送样系统、气路系统、抽气系统、安装机台、真空测量及电控系统等部分组成。

                       

                      The equipment is consisted of deposition vacuum chamber, induction heating stage, sample loading chamber, automatic sample loading system, gas system, pumping system, supporting frame, vacuum measurement and electric control system etc.

                      技术指标 Technical specs

                      型号 Model

                      TDL85P

                      炉内真空度

                      Internal vacuum

                      极限真空Ultimate vacuum

                      9.0×10-5Pa

                      拉伸机构运动时

                      When lifting mechanism is in motion

                      1.0×10-4Pa

                      系统漏率

                      System leak rate

                      停泵关机24小时后真空度≤5Pa

                      Vacuum level5Pa  24 hours after turning off pump and the system.

                      炉体

                      Furnace

                      沉积室 Deposition chamber

                      筒形立式结构,尺寸Φ900×1000 mm

                      Vertical cylinder structure, size Φ900×1000 mm

                      进样室

                      Handling chamber

                      尺寸Ф300×300mm

                      Size Ф300×300mm

                      自动送样机构

                      Automatic sample loading system

                      慢速档速率范围

                      Low gear speed range

                      0.066/h

                      档速率范围

                      High gear speed range

                      50/min

                      转速范围 Rotation rate

                      030rpm

                      有效行程

                      Effective stroke

                      500

                      额定总功率 Rate power

                      35KW

                      循环水用量 circulation water usage

                      3m3/h

                      真空配置 vacuum acquiring set

                      分子泵、罗茨泵、机械泵、插板阀

                      Molecular pump, roots pump, mechanical pump, gate valve

                      占地面积 space occupied

                      2700×1200×3000mm3(含电源)(including power set)


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