首页 ? Product ? CVD Coating Equipment ? Hard Carbon Film Deposition Equipment
Application（用途）:
It is a vertical structure, high vacuum single chamber film coating equipment. Used for developing single layer film that is the diamond- like carbon film (DLC). DLC film has high infrared spectrum transmittance, high hardness, low friction coefficient and good chemical stability, can be used for antireflection film and protective film of various optical materials which plays anti-fraying, anticorrosion, anti-deliquescence and anti-oxidation effect, and suitable for mass production of infrared lens optical manufacturers.
Structure（组成）
Film coating chamber, target electrode, RF power, solenoid coil, control power supply (CPS), vacuum pumping system, vacuum measurement system, electrical control system, gas circuit system and water circuit system.
Specification（技术指标）
|
Type |
FHL-600 |
|
|
Sputtering Vacuum Chamber |
cylindrical, size: Ф600×400mm |
|
|
Limited Vacuum of Sputtering Vacuum Chamber |
5×10-4 Pa (after baking and degasing) |
|
|
Regain Vacuum Time |
3×10-3Pa after40 min. (pumping after short-time exposed to air and filled with nitrogen) |
|
|
Target Electrode and Upper Electrode Plate |
To install a target electrode and placed a sample which size isФ251mm on top of it at the coating film chamber chassis. To install a set of upper electrode plate on the cover, it forms a plate capacitor with the target electrode which distance adjustable continuously. |
|
|
Electrical Control System |
RF power, excitation power, and main power |
|
|
Gas Circuit System |
three-way Mass Flow Controller (MFC) |
|
|
Floor Occupied |
Main Set |
1200×1150mm2 |
|
Electrical Cabinet |
700×700mm2(two sets) |
|
中国·沈阳市浑南新区新源街1号
024-23826855
WeChat scan
Focus on Shenyang Keyi
? 2015-2019 Copyright SKY Technology Development Co., Ltd
LIAO ICP 15011951-1
